Extreme Ultraviolet (EUV) lithography uses 13.5nm wavelength light for patterning sub-7nm features.
- True
- False
Answer: True
EUV lithography (ASML) enables single-patterning of sub-7nm features vs multi-patterning with DUV. Challenges: light source power, mask defects, resist sensitivity. Critical technology for leading-edge chips; India monitors for future capability development.